JPH022459Y2 - - Google Patents

Info

Publication number
JPH022459Y2
JPH022459Y2 JP1983141123U JP14112383U JPH022459Y2 JP H022459 Y2 JPH022459 Y2 JP H022459Y2 JP 1983141123 U JP1983141123 U JP 1983141123U JP 14112383 U JP14112383 U JP 14112383U JP H022459 Y2 JPH022459 Y2 JP H022459Y2
Authority
JP
Japan
Prior art keywords
suction
nozzles
ports
liquid
suction nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983141123U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6049949U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983141123U priority Critical patent/JPS6049949U/ja
Priority to EP84110913A priority patent/EP0139211B1/en
Priority to DE8484110913T priority patent/DE3480694D1/de
Priority to US06/649,800 priority patent/US4611553A/en
Publication of JPS6049949U publication Critical patent/JPS6049949U/ja
Application granted granted Critical
Publication of JPH022459Y2 publication Critical patent/JPH022459Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
    • G03C2001/7455—Edge bead nonuniformity coated at the border

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Nozzles (AREA)
JP1983141123U 1983-09-12 1983-09-12 吸引ノズル Granted JPS6049949U (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1983141123U JPS6049949U (ja) 1983-09-12 1983-09-12 吸引ノズル
EP84110913A EP0139211B1 (en) 1983-09-12 1984-09-12 Suction nozzle
DE8484110913T DE3480694D1 (de) 1983-09-12 1984-09-12 Saugduese.
US06/649,800 US4611553A (en) 1983-09-12 1984-09-12 Suction nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983141123U JPS6049949U (ja) 1983-09-12 1983-09-12 吸引ノズル

Publications (2)

Publication Number Publication Date
JPS6049949U JPS6049949U (ja) 1985-04-08
JPH022459Y2 true JPH022459Y2 (en]) 1990-01-22

Family

ID=15284691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983141123U Granted JPS6049949U (ja) 1983-09-12 1983-09-12 吸引ノズル

Country Status (4)

Country Link
US (1) US4611553A (en])
EP (1) EP0139211B1 (en])
JP (1) JPS6049949U (en])
DE (1) DE3480694D1 (en])

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877475A (en) * 1984-11-01 1989-10-31 Matsushita Electric Industrial Co., Ltd. Method for producing information storage disk
US4754771A (en) * 1985-07-17 1988-07-05 Hybritech Incorporated Apparatus for washing beads
JPH0425259Y2 (en]) * 1986-12-10 1992-06-16
JPH074583B2 (ja) * 1988-05-30 1995-01-25 富士写真フイルム株式会社 ウェブの除塵方法
JPH0611422B2 (ja) * 1988-10-04 1994-02-16 富士写真フイルム株式会社 塗布層縁部の吸引処理方法及び吸引ノズル
SE500772C2 (sv) * 1992-11-25 1994-08-29 Staffan Sjoeberg Anordning för rengöring av föremål i rörelse
US5608943A (en) * 1993-08-23 1997-03-11 Tokyo Electron Limited Apparatus for removing process liquid
EP0740197B1 (de) * 1995-04-26 1999-07-07 ILFORD Imaging Switzerland GmbH Verfahren und Vorrichtung zur Vorhangbeschichtung eines bewegten Trägers
US6123145A (en) * 1995-06-12 2000-09-26 Georgia Tech Research Corporation Synthetic jet actuators for cooling heated bodies and environments
US5758823A (en) * 1995-06-12 1998-06-02 Georgia Tech Research Corporation Synthetic jet actuator and applications thereof
US6457654B1 (en) 1995-06-12 2002-10-01 Georgia Tech Research Corporation Micromachined synthetic jet actuators and applications thereof
EP0774301A1 (en) * 1995-10-19 1997-05-21 Minnesota Mining And Manufacturing Company Apparatus for removing material from a coated moving web and coating apparatus using such apparatus
US5952050A (en) 1996-02-27 1999-09-14 Micron Technology, Inc. Chemical dispensing system for semiconductor wafer processing
DE19716466A1 (de) * 1997-04-21 1998-10-22 Bachofen & Meier Ag Verfahren und Vorrichtung zum Auftragen von Dispersionen auf eine Materialbahn
US6103636A (en) * 1997-08-20 2000-08-15 Micron Technology, Inc. Method and apparatus for selective removal of material from wafer alignment marks
US6554607B1 (en) 1999-09-01 2003-04-29 Georgia Tech Research Corporation Combustion-driven jet actuator
JP4512926B2 (ja) * 1999-12-01 2010-07-28 Ｊｔｓ株式会社 コーティング装置
JP3405312B2 (ja) * 2000-02-25 2003-05-12 日本電気株式会社 塗布膜除去装置
WO2002072421A2 (en) 2001-03-10 2002-09-19 Georgia Tech Research Corporation Modification of fluid flow about bodies and surfaces through virtual aero-shaping of airfoils with synthetic jet actuators
DE10159334A1 (de) * 2001-12-03 2003-06-18 Hilti Ag Vorrichtung zum Reinigen eines Bohrloches
EP1319446A2 (en) 2001-12-13 2003-06-18 Dow Global Technologies Inc. Suction nozzle
JP5068577B2 (ja) * 2007-04-25 2012-11-07 株式会社エムテーシー 角形被処理体のフォトレジストの除去装置
JP5546516B2 (ja) * 2011-09-22 2014-07-09 富士フイルム株式会社 塗布装置及び塗布方法
JP6390732B2 (ja) * 2013-08-05 2018-09-19 東京エレクトロン株式会社 処理液供給装置
JP6221954B2 (ja) 2013-08-05 2017-11-01 東京エレクトロン株式会社 現像方法、現像装置及び記憶媒体
CN104742490A (zh) * 2015-03-05 2015-07-01 南京第壹有机光电有限公司 一种选择性除膜装置
NL2019096B1 (en) * 2017-06-20 2018-12-27 Suss Microtec Lithography Gmbh Nozzle tip adapter, nozzle assembly as well as nozzle

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899339A (en) * 1957-08-23 1959-08-11 Foating to a moving web
US3849830A (en) * 1973-09-18 1974-11-26 W Wagner Test tube washer

Also Published As

Publication number Publication date
DE3480694D1 (de) 1990-01-18
JPS6049949U (ja) 1985-04-08
EP0139211A3 (en) 1987-10-28
EP0139211A2 (en) 1985-05-02
US4611553A (en) 1986-09-16
EP0139211B1 (en) 1989-12-13

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